Pressure measurement in the Semiconductor Industry

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Ensure accurate pressure measurement and control

From Chemical Mechanical Polishing (CVD) to Dry Etching, learn how Druck's technology helps chip makers around the world achieve speed, stability and repeatability on pressure measurement and pressure control testing.

Semiconductor Infrastructure: Learn how Druck helps chip makers achieve the highest reliability in the industry.

Lithography

Avoid overheating with pressure sensors

Laser needs N2 gas control and the protection of heating up coming from laser beam should be supported by pressure sensors, such as Druck TERPS8100, a standard pressure sensor to major lithography tool maker companies around the world.

Deposition (CVD)

Controlling Chemical Vaper Deposition

Deposition process, also known as “Chemical Vaper Deposition”, needs controlling many kinds of gases flow rate (AlCl3, WF6 for IC and GaNfor LED), but it’s mostly used as MFC supported by Thermal MFC without pressure sensors.

However, there is the subject kinds of accuracy at high temp in case of thermal MFC without pressure sensor.

ADROIT6200 provides the accuracy needed for this application.

Dry Etching

Solutions that support the process

Precision is key in the dry etching processes for the semiconductor industry. Different uses of dry etching make up the largest subsystem process during chip fabrication.

Druck solutions can be used in different ways during this process to help control pressure in the mass flow controller (MFC) and gas box systems to achieve very accurate gas flow control.

Main applications are: MFC for dry etcher and Gas box system for dry etcher

Chemical Mechanical Polishing (CMP)

Zero reset solutions

During this part of the process the wafer material is planarized to smooth surfaces through a combination of chemical and mechanical forces. The head of the polisher system needs to be calibrated and maintained in a way that produces fast and repeatable results for each wafer that passes through this process.

Our UNIK5000 configurable sensor coupled with Druck's Pressure Indicator and Loop Calibrator is ideal for constant control of pressure sensor applications to achieve consistent results during this process.

Semicon pressure variation

There are 2 technologies being used in semiconductor mass flow measurement:

• Thermal distribution

• Differential pressure

Both measurements are pressure sensitive. It means a change in applied pressure will affect the mass flow measurement accuracy. Device makers are using independent pressure sensor to compensate mass flow measurement error induced by applied pressure. It seems that current trend is integrating pressure sensor to mass flow meter or mass flow controller. It is claimed as pressure insensitive mass flow meter or mass flow controller.

The advantage of using pressure sensor in MFC is the response:

With differential pressure measurement, the MFC can achieve the set/targeted mass flow much faster than thermal distribution measurement.

 

In differential pressure MFC, PID control can be used during flow increase ①, steady state ②, and flow decrease ③.

While in thermal distribution MFC, PID control can only be used during flow increase①.

 

 

Helping the Semiconductor Industry Succeed

Explore Druck's Pressure Sensors:

UNIK5000 VCR 3DImage_02

High-performance configurable solution for pressure measurement

UNIK5000 Sensor
one sensor no compromises

A new range of high performance pressure sensing solutions.

ADROIT6200
TERPS USB to VCR

TERPS sensor designed for Semiconductor

TERPS
Druck modules

Customized sensor solutions to your needs.

Modules
Test, Calibration and Pressure Controllers
Pressure controller

Pressure controllers and indicators that measure, test and calibrate pressure.

PACE
DPI802 Pressure Indicator and Loop Calibrator

Druck DPI802

Pressure Indicator and Loop…
PACE Tech Article border2

Best practices on design for automated test systems

Pressure Test System

Download Test & Calibration documentation

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